Electron backscattered diffraction using a new monolithic direct detector: High resolution and fast acquisition

A monolithic active pixel sensor based direct detector that is optimized for the primary beam energies in scanning electron microscopes implemented back-scattered diffraction (EBSD) applications. The high detection efficiency of and its large array pixels allow sensitive accurate Kikuchi bands arising from excitation 4 keV to 28 keV, with optimal contrast occurring range 8–16 keV. pattern acquisition speed substantially improved via a sparse sampling mode, resulting reduced number on detector. Standard inpainting algorithms are effectively estimate information skipped regions acquired pattern. For EBSD mapping, an as 5988 scan points per second demonstrated, tolerable fraction indexed accuracy. collective capabilities spanning angular resolution patterns achieved same detector, facilitating simultaneous modalities enable multitude advanced applications, including lattice strain structural refinement, low-dose characterization, 3D-EBSD dynamic situ EBSD.